MSD series DC sputtering power supply adopts the company's core DC control system combined with excellent arc processing scheme, so that the product has very stable performance, high product reliability, small arc damage and good process repeatability. Adopt Chinese and English display interface, easy to operate.
● Fast arc response, response time <100ns
● Bottom energy storage, <1mJ/kW
● Compact installation structure, 3U standard chassis
● Chinese/English display interface, easy to operate
● Precise control
● Wide range of output
● Perfect protection function
Input | Input voltage: 3AC380V±10% |
Power: 20kW、30 kW Input power frequency: 50Hz/60Hz | |
Output | Max. output voltage: 800V |
Max. output current: 50A、75A | |
Output current ripple: ≤3% rms | |
Output Voltage Ripple: ≤2% rms | |
Technical index | Ignition voltage: 1000V / 1200V optional |
Conversion efficiency: 95% | |
Arc off time: ＜100ns | |
Communication interface: Standard RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet and EtherCAT are optional) | |
Dimension(H*W*D)mm: 132*482*560: 176*482*700 | |
Cooling mode: air cooling |
Acess the ful technicaldocumentation for the HanYuan distributed charging system, including power cabinet and dispenserspecifications, dimensions,connector options,and installation requirements.
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