RPJ Series
RF Power Supply

The RPJ Series relies on mature RF generation technology to provide customers with RF power supplies with greater power,higher precision, and fast response.Tool it has functions such as phase setting and pulse control.

Applicable fields:photovoltaic industry,flat panel display industry, semiconductor industry,chemical industry Industry,laboratory,scientific research,manufacturing,etc.

Applicable processes:plasma enhanced chemical vapor deposition (PECVD),plasma Sub-body etching,plasma cleaning,radio frequency ion source,plasma diffusion,Plasma polymerization sputtering,reactive sputtering,etc.

Key features

● Adopting full digital control and high-precision sensors

● Able to achieve pulse output
● Real time impedance power detection

● CEX external signal input, precise control of each phase

The main parameters

Input

Input voltage 3φAC208V,3φAC380V;50/60Hz
Coversion efficiency ≥70%

Output

Output power 3kW,6kW,12kW,20kW,24kW
Output frequency 13.56MHz,27.12MHz,40.68MHz,60MHz
Output impedance 50Ω+0j
Output frequency stability ±0.005%
Output mode Continuous,pulse

Performance index

Power accuancy 4Wor±1%
Harmonic -40dBc
Spurious -40dBc
Pulse frequency 100Hz~20kHz
Minimum pulse width 25μs
Control interface Analog,RS-232,Ethernet, EtherCAT etc.

Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.

More information

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RPJ Series RF Power Supply-Datasheet
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RPJ SeriesRF Power Supply